MECHANICAL PUMP  FLUID
PLASMA OIL 80

DESCRIPTION
Plasma Oil 80 is a hydrocarbon fluid developed especially for mechanical pump use. It has been carefully distilled to remove interfering high reactive components which can react with process gases to form sludge. Through high vacuum distillation, Plasma Oil 80 is purified to optimize characteristics such as very low vapor pressure, durability, resistance to sludge formation and lubricity.
Recommended for mass spectrometers, some plasma etch and LPCVD applications.

 
SPECIFICATIONS
Ultimate Pressure 10-6 Torr
Specific Gravity .8952 gm/cc
Boiling Point @ .01 Torr 125°C  (257°F)
Viscosity @ 40°C 70.84 cSt  (328 SUS)
Pour Point -6.6°C (20°F)
Flash Point 226°C (438°F)
Fire Point 266°C (510°F)
To compare products, click  here  to see the entire specification chart of mechanical pump fluids offered by Inland.
Mechanical Fluids
SITE MAP
Inland Product s