Invoil 46


Invoil 46 is a synthetic (arylalkyldiphenylether) diffusion pump fluid whose performance combines the best properties of silicones and polyphenyl ethers.  It was developed to accommodate the performance requirements of such applications such as CRT evacuation, optical coatings, evaporation and sputtering, vacuum metallurgy, leak detection, and mass spectrometry.

As a result of its unique chemical structure, Invoil 46 offers excellent thermal stability and radiation resistance.  It can attain untrapped pressures near 10-8 torr.  It's ability to recover from accidental exposure to atmosphere during normal operation is comparable to that of silicon pump fluids.  In addition, deposits formed i the even of ionizatino or breakdown of the fluid are conductive and do not accumulate static charges.
 

Specifications  
Vapor Pressure @ 25º C: 5x10-8 torr
Boiling Point @ .01 torr: 129ºC (264ºF)
Viscosity @ 40ºC: 65 cSt  (300 SUS)
Viscosity @ 100ºC: 9.0 cSt (56 SUS)
Pour Point: -20ºC (-4ºF)
Flash Point: 260ºC (500ºF)
Density: 0.90 g/mL
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