Inland TW and HVTW

Inland TW and HVTW fluids are specifically recommended for applications where exposure to reactive or corrosive gasses is prevalent. These products are a distilled USP grade hydrocarbon oil.  Both unsaturates and aromatics have been removed to result in a longer lasting, superior fluid. They also contain an excellent additive package for thermal and chemical resistance.  The high viscosity Inland HVTW product is excellent  for use in piston pumps.  Typical applications include nitride decomposition, LPCVD, plasma etch, and ion implantation.  When compared to Invoil 20, Inland TW will last 1.5 - 4 times longer.

  • Corrosive Service
  • High Thermal Stability
  • High Oxidation Stability
  • Reduced Backstreaming
    • Specifications
    INLAND TW
     INLAND HVTW
     
    Rotary Vane
    Piston Pump
    Vapor Pressure @ 25º C:
    <1x10-6 torr
    <1x10-7 torr
    Boiling Pt. @ .01 torr:
    158ºC (316ºF)
    161ºC (322ºF)
    Viscosity @ 40ºC:
    65 cSt (300 SUS)
    106 cSt (480 SUS)
    Viscosity @ 100ºC:
    9.1 cSt (55.7 SUS)
    12.9 cSt (69.8 SUS)
    Pour Point:
    -12ºC (10ºF)
    -12ºC (10ºF)
    Flash Point:
    243ºC (470ºF)
    249ºF (480ºF)
    Fire Point:
    270ºC (517ºF)
    277ºC (531ºF)
    Density:
    0.86 g/mL
    0.86 g/mL
    To compare products, click   to see the entire specification chart of mechanical pump fluids offered by Inland.
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