The ideal diffusion pump fluid would be thermally stable, non-volatile, chemically inert and non-toxic.  Real diffusion pump fluids, on the other hand, represent compromises between these properties; no one fluid does it all.  Inland offers a broad range of diffusion pump fluids, including hydrocarbon, inert PFPE, polyphenyl ether and silicone fluids for a wide range of applications.  These fluids include distilled hydrocarbons, silicones, organic esters and other synthetics.  This wide selection ensures that we can supply the proper fluid for your application.

Product

Vapor Pressure @ 25ºC (torr)

Boiling Pt. @ .01 Torr (ºC)

Viscosity @40ºC (cSt)

Viscosity @ 100ºC (cSt)

Pour Pt. (ºC)

Flash Pt. (ºC)

Fire Pt. (ºC)

Density @ 25ºC (g/ml)

Reclaimable ?

Invoil

2x10^-6

126

27

3.9

-52

196

229

0.98

Yes

Invoil S

1x10^-6

141

12

3

-56

209

247

0.91

Yes

Invoil 20

3x10^-6

127

58

8.5

-10

224

259

0.86

Yes

Invoil 30

5x10^-6

127

58

8.5

-10

241

271

0.86

Yes

Invoil 37

1.6x10^-7

137

25

4.1

-28

225

None

1.17

Yes

Invoil 40

1x10^-5

126

58

8.5

-9

243

261

0.86

Yes

Invoil 44

3x10^-6

126

35

5.6

-10

201

244

0.86

Yes

Invoil 46

<10^-8

129

65

9.0

-20

260

None

0.90

Yes

Invoil 702

3.3x10^-6

**190

26.8

6.2

<0

193

None

1.07

Yes

Invoil 704

2x10^-8

**210

24.2

6.2

<-9

221

None

1.07

Yes

Invoil 705

2.4x10^-9

**243

66

9.8

<0

243

None

1.09

Yes

Invoil 940

2x10^-8

**221

24.2

6.2

<-9

221

None

1.07

Yes

Santovac^® 5

4x10^-10

200

307

15.4

4

288

349

1.20

Yes

Santovac^® 5P Ultra

4x10^-10

200

307

15.4

4

288

349

1.20

Yes

Fomblin^®

Y 18/8

*2x10^-8

N/A

*190

N/A

-42

None

None

*1.89

Yes

Fomblin^® Y25/9

*2x10^-9

N/A

*285

N/A

-35

None

None

*1.89

Yes

Fomblin^® Y40/11

*6x10^-12

N/A

*474

N/A

-32

None

None

*1.91

Yes

Fomblin^® Y140/13

*5x10^-13

N/A

*508

N/A

-23

None

None

*1.92

Yes