Fomblin
YL-Vac Inert Vacuum Pump Fluids
Fomblin vacuum pump fluids are non-flammable, chemically inert, and
thermally stable. When used with proper pump filtration, Fomblin
PFPE fluids provide exceptionally long service life. These fluids
have excellent lubricity properties and are available in viscosity grades
suitable for use in all vacuum pumps. Consult your Inland representative
or sales engineer for assistance in selecting the proper viscosity grade
for your specific pump. Inland can provide a wide range of container
sizes.
| Low vapor pressure |
Low volatility |
Non-flammable |
Good radiation stability |
| High dielectric properties |
Excellent Compatibility |
Chemical Inertness |
CFC free -Ozone friendly |
| Good solvent resistance |
No flash or fire point |
High Thermal Stability |
Low surface tension |
| Low toxicity |
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| Specifications |
Y06/6
|
Y14/6
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Y16/6
|
Y25/6
|
| Vapor Pressure @ 25º
C: |
3x10-6 torr
|
2x10-7 torr
|
2x10-6 torr
|
4x10-8 torr
|
| Boiling Range: |
>250ºC
|
>250ºC
|
>250ºC
|
>250ºC
|
| Viscosity @ 20ºC: |
64 cSt
|
148 cSt
|
168 cSt
|
276 cSt
|
| Viscosity @ 100ºC: |
4 cSt
|
7.5 cSt
|
8.6 cSt
|
10 cSt
|
| Pour Point: |
-50ºC
|
-45ºC
|
-45ºC
|
-35ºC
|
| Flash Point: |
None
|
None
|
None
|
None
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| Fire Point: |
None
|
None
|
None
|
None
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| Density: |
1.88 g/mL
|
1.89 g/mL
|
1.89 g/mL
|
1.90 g/mL
|
Fomblin YL-Vac RP Inert Fluids
Fomblin YL-Vac RP incorporates a new patented Fomblin anti rust additive
which enables the fluids to withstand even the most harsh chemical environments.
The additive, based upon the Fomblin perfluoro-polyether structure, does
not affect the chemical resistance and high vacuum performance of the Fomblin
YL-Vac fluids.
| Specifications |
Y06/6 RP
|
Y14/6 RP
|
Y16/6 RP
|
Y25/6 RP
|
| Boiling Point: |
>270ºC
|
>270ºC
|
>270ºC
|
>270ºC
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| Viscosity @ 20ºC: |
73 cST
|
165 cSt
|
165 cSt
|
290 cSt
|
| Vapor Pressure @ 20ºC: |
5x10-6 torr
|
4x10-7 torr
|
4x10-7 torr
|
4x10-7 torr
|
| Vapor Pressure @ 100ºC: |
3x10-3 torr
|
6x10-4 torr
|
4x10-7 torr
|
1x10-4 torr
|
| Flash Point: |
None
|
None
|
None
|
None
|
| Density: |
1.88 g/mL
|
1.89 g/mL
|
1.89 g/mL
|
1.90 g/mL
|
Fomblin SV Inert Vacuum Pump
Fluid
Fomblin SV is an advanced inert perfluorinated fluid with a back migration
rate of virtually zero. This fluid is excellent n dry etcher and
CVD applications without investing in dry pump technology.
| Specifications |
|
| Vapor Pressure at 20ºC: |
5x10-9 torr
|
| Boiling Point: |
>270ºC
|
| Viscosity @ 20ºC: |
276 cSt
|
| Viscosity @ 100ºC: |
10 cSt
|
| Pour Point: |
-38 cSt
|
| Flash Point: |
None
|
| Density: |
1.90 g/mL
|
| To compare products, click |
here |
to see the entire specification chart of mechanical pump fluids
offered by Inland. |