Fomblin
YH-VAC Inert Diffusion Pump Fluids
Fomblin YH-VAC fluids are suggested for applications requiring a high
quality vacuum such as in scanning electron and transmission microscopes,
mass spectrometers, particle accelerators, ion implantation, plasma and
vapor deposition processes, etc. In addition, it is recommended for
pumps handling reactive gases such as UF6, UF2, oxygen, ozone, tritium,
etc. Direct contact with these gases will not result in any type
of reaction or fluid degradation.
| Specifications |
Y18/8
|
Y25/9
|
Y40/11
|
Y140/13
|
| Vapor Pressure @ 20º
C: |
2x10-8 torr
|
2x10-9 torr
|
6x10-12 torr
|
5x10-13 torr
|
| Viscosity @ 20ºC: |
190 cSt
|
285 cSt
|
474 cSt
|
1508 cSt
|
| Pour Point: |
-10ºC (14ºF)
|
-10ºC (14ºF)
|
-10ºC (14ºF)
|
-10ºC (14ºF)
|
| Flash Point: |
None
|
None
|
None
|
None
|
| Fire Point: |
None
|
None
|
None
|
None
|
| Density: |
1.89 g/mL
|
1.89 g/mL
|
1.91 g/mL
|
1.92 g/mL
|
*FOMBLIN is a registered trademark of Ausimont S.p.a
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to see the entire specification chart of diffusion pump fluids
offered by Inland. |