| C- TW-4 mechanical pump fluid is a 100% paraffinic distilled hydrocarbon fluid containing no additives. Both unsaturates and aromatics have been removed to provide maximum purity and provide greater resistance to corrosive or reactive gases. |
| TW-4 is recommended for applications such as plasma etch, deposition, (not recommended for use in O2 enriched systems), and vacuum distillation. TW-4 is a USP grade, FDA approved fluid. |
| Ultimate Pressure | 1.7 x 10-4 Torr |
| Specific Gravity | .8638 gm/cc |
| Boiling Point @ .01 Torr | 153°C (307°F) |
| Viscosity @ 40°C | 61 cSt (283 SUS) |
| Pour Point | -12°C (10°F) |
| Flash Point | 204°C (399°F) |
| Fire Point | 240°C (464°F) |
MECHANICAL PUMP
FLUID
C- TW-7
| C- TW-7 is a highly refined 100% paraffinic hydrocarbon fluid which has undergone a hydrogenation step and molecular distillation to assure maxium purity as a high performance mechanical pump fluid. This fluid will be more stable in the presence of mild corrosive gases than ordinary hydrocarbons because its paraffinic composition, (lack of aromatics and unsaturates), offers reduced reactivity. |
| C- TW-7 is a less expensive alternative to synthetic fluids. Its ;ow vapor pressure helps prevent back migration through the system. Additionally, TW-7 has been shown to outlast ordinary hydrocarbon fluids. Typical applications include nitride deposition, plasma etch, ion implantation, LPCVD and vacuum distillation. TW-7 is a USP grade fluid. |
| Ultimate Pressure | 10-6 Torr |
| Specific Gravity | .875 gm/cc |
| Boiling Point @ .01 Torr | 158°C (316°F) |
| Viscosity @ 40°C | 64 cSt (297 SUS) |
| Pour Point | -12°C (10°F) |
| Flash Point | 243°C (469°F) |
| Fire Point | 270°C (518°F) |
| To compare products, click | here | to see the entire specification chart of mechanical pump fluids offered by Inland. |
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